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1 research outputs found
Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition
Author
Barak Bernd
Cherla Srikanth
+8 more
Engel Reiner
Höckele Uwe
Kyek Andreas
Lenz Benjamin
Nagi Ahmed
Pfeifer Günter
Purwins Hendrik
Weinzierl Kurt
Publication venue
'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
01/02/2014
Field of study
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VBN